Opis: Resonant MEMS

A must-have for any MEMS R&D group: for the first time fundamental and hard-to-come-by knowledge is combined in one ready reference.§The book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then goes on to provide a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the latest applications of resonant MEMS, such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.PART I. FUNDAMENTALS§Fundamental Theory of Resonant MEMS Devices§Frequency Response of Cantilever Beams Immersed in Viscous Fluids§Damping in Resonant MEMS§Parametrically-Excited Micro- and Nanosystems§Finite Element Modeling of Resonators§§PART II. IMPLEMENTATION§Capacitive Devices§Piezoelectric Resonant MEMS§Resonant MEMS Electrothermal Excitation§Nanoelectromechanical Systems (NEMS)§Organic Resonant MEMS Devices§Devices with Embedded Channels§Hermetic Packaging for Resonant MEMS§Compensation, Tuning and Trimming of MEMS Resonators§§PART III. APPLICATIONS§MEMS Inertial Sensors§Resonant MEMS Chemical Sensors§Biosensors§Fluid Properties Sensors§Energy Harvesting Devices

Szczegóły: Resonant MEMS

Tytuł: Resonant MEMS
Producent: VCH
ISBN: 9783527335459
Rok produkcji: 2015
Ilość stron: 496
Oprawa: Twarda

Recenzje: Resonant MEMS